A vacuum seal uses a magnetic fluid to introduce rotation into a vacuum atmosphere. It is a functional part of semiconductor, FPD, LED, and solar battery manufacturing equipment. It is one of the core products of Ferrotec. Vacuum seals are used for etching and film deposition of semiconductor wafers, as well as rotating mechanisms of FPD panel transfer robots. They ensure a closed space without any impurity and convey required power to the interior of the chamber.
