CVD-SiC is a silicon carbide product manufactured by our proprietary CVD method. SiC is a compound containing silicon (Si) and carbon (C) at a ratio of one to one. It has superior abrasion resistance, heat resistance, and corrosion resistance. CVD-SiC is widely used mainly as jigs used at high temperature, including wafer boats and tubes used in semiconductor fabrication processes, and dummy wafers used as a substitute for silicon wafers.
